The UHV-Test device is a flexible system for testing various kinds of vacuum chambers and applications.
It is equipped with a graphical user interface.
The superstructural parts are subdivided in four sections:
- Ultra clean gas supply incl. pressure regulator for N2 and O2
- Measuring chamber including turbopump, gate lock valve, gauges and forepump
- Load lock chamber incl. pumping system, gate lock valve, gauges and additional equipment
Customized solutions can be adapted too