The UHV-Test device is a flexible system for testing various kinds of vacuum chambers and applications.

It is equipped with a graphical user interface.

The superstructural parts are subdivided in four sections:

• Ultra clean gas supply incl. pressure regulator for N2 and O2
• Cabinet
• Measuring chamber including turbopump, gate lock valve, gauges and forepump
• Load lock chamber incl. pumping system, gate lock valve, gauges and additional equipment

Customized solutions can be adapted too