Interferometry at NTG
Since may 2010 NTG has a fully air-conditioned Interferometer measuring room (temperature stability Â±0,1K) including a laminar flow unit.
With this equipment we can provide full IBF processing of substrates for various customer demands.
The equipment comprises (among others) the following:
- 4" Zygo Interferometer AT+
- Aperture Converter 4 Inch to 6 Inch
- 4"-Transmission Sphere, F0,75; 1/20 Wave, P-V
- 6"-Transmission Sphere, F2,2; 1/20 Wave, P-V
- 4"-Calibration Sphere R0,75; Flatness < 1nm RMS
- 6"-Calibration Flat; Flatness < 1nm RMS