Interferometer
Saturday, 25. May 2013

Interferometry at NTG

Since may 2010 NTG has a fully air-conditioned Interferometer measuring room (temperature stability ±0,1K) including a laminar flow unit.

With this equipment we can provide full IBF processing of substrates for various customer demands. 

The equipment comprises (among others) the following:

  • 4" Zygo Interferometer AT+
  • Aperture Converter 4 Inch to 6 Inch
  • 4"-Transmission Sphere, F0,75; 1/20 Wave, P-V
  • 6"-Transmission Sphere, F2,2; 1/20 Wave, P-V
  • 4"-Calibration Sphere R0,75; Flatness < 1nm RMS
  • 6"-Calibration Flat; Flatness < 1nm RMS