White Light Interferometer
Tuesday, 21. November 2017

MicroXAM-100

MicroXAM 100 Optical Profiler

  • Modes: PSI and VSI
  • Manual X-Y Stage Movement: 100x100 mm
  • 1 Micron Step Height
  • 10X Objective
  • 2.5X Michelson Objective
  • Vertical Resolution: 0,1nm (PSI Mode)