{"id":5852,"date":"2017-06-15T11:52:00","date_gmt":"2017-06-15T09:52:00","guid":{"rendered":"http:\/\/x01_415.lux01.de\/_ntg\/r-ibe\/isa-200\/"},"modified":"2017-12-07T16:45:42","modified_gmt":"2017-12-07T15:45:42","slug":"isa-200","status":"publish","type":"page","link":"https:\/\/www.ntg.de\/en\/produkte\/ionenstrahl-technologien\/r-ibe\/isa-200\/","title":{"rendered":"ISA 200"},"content":{"rendered":"

[et_pb_section bb_built=”1″ fullwidth=”on” specialty=”off” _builder_version=”3.0.51″ custom_padding=”||0px|”][et_pb_fullwidth_image admin_label=”Kopfbild blau” _builder_version=”3.0.51″ src=”https:\/\/www.ntg.de\/wp-content\/uploads\/2017\/06\/NTG-IH-Beschleuniger7.jpg” show_in_lightbox=”off” url_new_window=”off” use_overlay=”off” border_style=”solid” animation=”fade_in” alt=”NTG Neue Technologien GmbH & Co. KG” background_position=”top_left” background_repeat=”repeat” background_size=”initial” \/][\/et_pb_section][et_pb_section bb_built=”1″ fullwidth=”off” specialty=”on” _builder_version=”3.0.51″ background_position_1=”top_left” background_repeat_1=”no-repeat” background_position_2=”top_left” background_repeat_2=”no-repeat” custom_padding=”0px|||”][et_pb_column type=”3_4″ specialty_columns=”3″][et_pb_row_inner admin_label=”Zeile” background_position=”top_left” background_repeat=”repeat” background_size=”initial” _builder_version=”3.0.51″ background_position_1=”top_left” background_repeat_1=”no-repeat” custom_padding=”||0px|”][et_pb_column_inner type=”4_4″ saved_specialty_column_type=”3_4″][et_pb_sidebar admin_label=”breadcrumb” _builder_version=”3.0.51″ area=”et_pb_widget_area_3″ orientation=”left” background_layout=”light” remove_border=”on” header_font_size=”11″ body_font_size=”11″ saved_tabs=”all” global_module=”3505″ show_border=”on” \/][et_pb_text admin_label=”ISA 200″ _builder_version=”3.0.90″ background_layout=”light” custom_padding=”||0px|” module_alignment=”left”]<\/p>\n

ISA 200<\/h1>\n

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[\/et_pb_text][et_pb_text admin_label=”ISA 200″ _builder_version=”3.0.90″ background_layout=”light” custom_padding=”||0px|” module_alignment=”left”]<\/p>\n

The ISA 200 is a procedural plant for inert gas ion beam etching as well as for reactive ion beam etching. Backside cooling, workpiece heating, interface for a clean room, beam monitoring via Faraday cup array and other useful features are available for this plant.\u00a0 A second ion source can be attached to combine the etching process with an ion beam assisted coating process via 4 sputter targets.<\/p>\n

Further informations can be downloaded here:<\/p>\n

ISA 200<\/a><\/p>\n

[\/et_pb_text][et_pb_text admin_label=”Galerie” _builder_version=”3.0.51″ background_layout=”light” text_orientation=”left” border_style=”solid” border_style_all=”solid” module_alignment=”left”]<\/p>\n\n\t\t