The IBF 5 is the smallest and also the newest Ion Beam Figuring plant from NTG. Optical Components between 0.5mm and 5mm diameter can be treated in highest accuracy. Our new developed RF-driven ion source with pentode extraction system which is operating at 3kV can provide beam diameters between 40 and 150μm and can be used for form error correction as well as for shaping.
Here you can find the presentation on IBF 5 by Dr. David Schäfer:
Further informations can be downloaded here: