Motor driven high precision linear Feedthroughs
Thursday, 23. May 2013

High Precision Linear UHV-Feedthrough

The Feedthrough is provided for precise linear translation

Stroke: as required (max. 250mm)
Supporting flange: minimum diameter 100mm (CF or other)
Pos. Accuracy: <10µm (depending on the type of stepper motor used)
Leak rate: <10-10mbar*l/sec
Bakeout: bakeable to 300°C
Water cooling: cooling pipes inside the moving shaft