Our IBF 5 represents a milestone in our company history. The use of our new RF 5 µB ion beam source with a smallest tool size of 40µm at ablation rates >40nm/s opens up new fields of application in micro-optics. Maintenance intervals of 2000 hours enable long-term machining, which is indispensable for mold array production. Due to the small tool size, the highest demands are placed on positioning accuracy and dynamics.
Easy operation is ensured by specially developed precision sensors in vacuum design inside the process chamber: A confocal sensor, a video microscope and a micro-faraday cup as system reference ensure that the tool has a maximum offset of <1µm in relation to the workpiece.
For more informations click here: ion beam technology